Attached files

file filename
EX-31.2 - EX-31.2 - CASCADE MICROTECH INCd38018dex312.htm
EX-31.1 - EX-31.1 - CASCADE MICROTECH INCd38018dex311.htm
EX-32.2 - EX-32.2 - CASCADE MICROTECH INCd38018dex322.htm
EX-10.23 - EX-10.23 - CASCADE MICROTECH INCd38018dex1023.htm
EX-10.22 - EX-10.22 - CASCADE MICROTECH INCd38018dex1022.htm
EX-32.1 - EX-32.1 - CASCADE MICROTECH INCd38018dex321.htm
EX-21.1 - EX-21.1 - CASCADE MICROTECH INCd38018dex211.htm
10-K - FORM 10-K - CASCADE MICROTECH INCd38018d10k.htm

EXHIBIT 23.1

Consent of Independent Registered Public Accounting Firm

The Board of Directors

Cascade Microtech, Inc.:

We consent to the incorporation by reference in the registration statements (Nos. 333-168692, 333-188833, 333-196408 and 333-204684) on Form S-8, and (No. 333-188245) on Form S-3 of Cascade Microtech, Inc. of our report dated March 7, 2016, with respect to the consolidated balance sheets of Cascade Microtech, Inc. and subsidiaries as of December 31, 2015 and 2014, and the related consolidated statements of operations, comprehensive income, shareholders’ equity, and cash flows for each of the years in the three-year period ended December 31, 2015, and the effectiveness of internal control over financial reporting as of December 31, 2015, which reports appear in the December 31, 2015 annual report on Form 10-K of Cascade Microtech, Inc.

/s/ KPMG LLP

Portland, Oregon

March 7, 2016