This amendment dated as of March 5, 2015 is between JPMorgan Chase Bank, N.A. (together with its successors and assigns, the “Bank”), and Cascade Microtech, Inc., an Oregon corporation (the “Borrower”).

J. Limitation on Loans, Advances to and Investments in Others and Receivables from Others. Purchase, hold or acquire any Equity Interest or evidence of indebtedness of, make or permit to exist any loans or advances to, permit to exist any receivable from, or make or permit to exist any investment or acquire any interest whatsoever in, any Person, except: (1) extensions of trade credit to customers in the ordinary course of business on ordinary terms; (2) Permitted Investments; (3) loans, advances, investments and receivables existing as of the date of this agreement that have been disclosed to and approved by the Bank in writing and that are not to be paid with proceeds of borrowings under the Credit Facilities; (4) advances to employees in the ordinary course of business in an amount not to exceed $100,000 at any one time outstanding; (5) loans and advances from the Borrower to a Guarantor or from a Guarantor to the Borrower; (6) investments in and acquisition of interests in a Guarantor; (7) loans and advances to Domestic Subsidiaries that are not a Guarantor in an amount not to exceed $2,000,000 at any one time outstanding; (8) investments in and acquisition of interests in Domestic Subsidiaries that are not a Guarantor in an amount not to exceed $2,000,000 in the aggregate in any Test Period; (9) loans and advances to Cascade Microtech GmbH for the purpose of acquiring ATT Advanced Temperature Test Systems GmbH (the “ATT Acquisition Loans”), (10) loans and advances to Foreign Subsidiaries hereof (other than ATT Acquisition Loans) in an amount not to exceed

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$5,000,000; at any one time outstanding; (11) investments in and acquisition of interests in Foreign Subsidiaries in an amount not to exceed $5,000,000 in the aggregate in any Test Period; and (12) Permitted Acquisitions in an amount not to exceed $5,000,000 in the aggregate in any Test Period.

M. Capital Expenditures. Make Capital Expenditures (whether by purchase or capital lease of any fixed assets, or otherwise) in excess of: (1) $7,500,000.00 in the aggregate in any Test Period ended on or prior to December 31, 2014; (2) $9,500,000.00 in the aggregate in for the fiscal year ending December 31, 2015; and (3) for the fiscal year ending December 31, 2016 and each fiscal year ending thereafter, an amount equal to five percent (5%) of the total revenue of the Borrower for the immediately preceding fiscal year.

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IN WITNESS WHEREOF, the Borrower and the Bank have caused this amendment to be duly executed as of the date first above written.

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Appendix A

March 5, 2015

Cascade Microtech, Inc.

9100 SW Gemini Drive

Beaverton, Oregon 97008

Re: $10,000,000 Senior Secured Credit Facility

Ladies and Gentlemen:

This letter is delivered to you (the “Borrower”) in connection with that certain Amendment Credit Agreement dated as of March 5, 2015 by and between JPMorgan Chase Bank, N.A. (together with its successors and assigns, the “Bank”) and the Borrower (the “Credit Agreement Amendment”), which amendment amends that certain Credit Agreement dated as of August 8, 2013 by and between the Bank and the Borrower (as amended or otherwise modified from time to time, the “Credit Agreement”). In connection with the Credit Agreement, the Bank and the Borrower entered into that certain letter agreement dated as of August 8, 2013 (the “Fee Letter”), which letter sets forth certain financial terms associated with the senior secured credit facility made available by the Bank to the Borrower under the Credit Agreement. In connection with, and in consideration of, the agreements contained in the Credit Agreement Amendment, the Borrower and the Bank agree to amend the paragraph of the Fee Letter titled “Non-usage Fee” by deleting the reference to the percentage “0.35%” and substituting the percentage “0.25%” in its stead.

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If the foregoing is in accordance with your understanding, please sign and return this letter agreement to us.

Accepted and agreed to

as of the first date written above:

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