Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - CASCADE MICROTECH INCFinancial_Report.xls
EX-31.2 - EX-31.2 - CASCADE MICROTECH INCd845533dex312.htm
EX-23.1 - EX-23.1 - CASCADE MICROTECH INCd845533dex231.htm
EX-32.1 - EX-32.1 - CASCADE MICROTECH INCd845533dex321.htm
EX-31.1 - EX-31.1 - CASCADE MICROTECH INCd845533dex311.htm
EX-32.2 - EX-32.2 - CASCADE MICROTECH INCd845533dex322.htm
10-K - 10-K - CASCADE MICROTECH INCd845533d10k.htm

Exhibit 21.1

List of Subsidiaries

Cascade Microtech Germany, GmbH

Cascade Microtech Japan, K.K.

Cascade Microtech Singapore PTE, Ltd.

Cascade Microtech Taiwan Co., Ltd.

Cascade International Trading (Shanghai) Co., Ltd.

Advanced Temperature Test Systems GmbH