Attached files
| file | filename |
|---|---|
| EXCEL - IDEA: XBRL DOCUMENT - CASCADE MICROTECH INC | Financial_Report.xls |
| 10-K - FORM 10-K - CASCADE MICROTECH INC | d283481d10k.htm |
| EX-21.1 - LIST OF SUBSIDIARIES - CASCADE MICROTECH INC | d283481dex211.htm |
| EX-31.1 - SECTION 302 CEO CERTIFICATION - CASCADE MICROTECH INC | d283481dex311.htm |
| EX-32.1 - SECTION 906 CEO CERTIFICATION - CASCADE MICROTECH INC | d283481dex321.htm |
| EX-32.2 - SECTION 906 CFO CERTIFICATION - CASCADE MICROTECH INC | d283481dex322.htm |
| EX-31.2 - SECTION 302 CFO CERTIFICATION - CASCADE MICROTECH INC | d283481dex312.htm |
Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
The Board of Directors and Shareholders
Cascade Microtech, Inc.:
We consent to incorporation by reference in the registration statements on Form S-8 (Nos. 333-121964, 333-145353, 333-157058, 333-161297 and 333-168692), and Form S-3 (No. 333-145349) of Cascade Microtech, Inc. of our report dated March 5, 2012, with respect to the consolidated balance sheets of Cascade Microtech, Inc. as of December 31, 2011 and 2010, and the related consolidated statements of operations, shareholders’ equity, and cash flows for each of the years in the three-year period ended December 31, 2011 and the related financial statement schedule, which report appears in the December 31, 2011 annual report on Form 10-K of Cascade Microtech, Inc.
/s/ KPMG LLP
Portland, Oregon
March 5, 2012