Attached files
| file | filename |
|---|---|
| EX-21.1 - EX-21.1 - RUDOLPH TECHNOLOGIES INC | y83045exv21w1.htm |
| EX-23.2 - EX-23.2 - RUDOLPH TECHNOLOGIES INC | y83045exv23w2.htm |
| EX-23.1 - EX-23.1 - RUDOLPH TECHNOLOGIES INC | y83045exv23w1.htm |
| EX-32.2 - EX-32.2 - RUDOLPH TECHNOLOGIES INC | y83045exv32w2.htm |
| EX-31.2 - EX-31.2 - RUDOLPH TECHNOLOGIES INC | y83045exv31w2.htm |
| EX-31.1 - EX-31.1 - RUDOLPH TECHNOLOGIES INC | y83045exv31w1.htm |
| 10-K - FORM 10-K - RUDOLPH TECHNOLOGIES INC | y83045e10vk.htm |
Exhibit 32.1
CERTIFICATION
OF CHIEF EXECUTIVE OFFICER
PURSUANT TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002
PURSUANT TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002
I, Paul F. McLaughlin, certify, pursuant to 18 U.S.C.
Section 1350, as adopted pursuant to Section 906 of
the Sarbanes-Oxley Act of 2002, that the Annual Report of
Rudolph Technologies, Inc. on
Form 10-K
for the year ended December 31, 2009 fully complies with
the requirements of Section 13(a) or 15(d) of the
Securities Exchange Act of 1934 and that information contained
in such Annual Report on
Form 10-K
fairly presents in all material respects the financial condition
and results of operations of Rudolph Technologies, Inc.
Date: March 5, 2010
| By: |
/s/ Paul
F. McLaughlin
|
Paul F. McLaughlin
Chairman and Chief Executive Officer