Attached files
| file | filename |
|---|---|
| EX-32.1 - EX-32.1 - RUDOLPH TECHNOLOGIES INC | y83045exv32w1.htm |
| EX-23.2 - EX-23.2 - RUDOLPH TECHNOLOGIES INC | y83045exv23w2.htm |
| EX-23.1 - EX-23.1 - RUDOLPH TECHNOLOGIES INC | y83045exv23w1.htm |
| EX-32.2 - EX-32.2 - RUDOLPH TECHNOLOGIES INC | y83045exv32w2.htm |
| EX-31.2 - EX-31.2 - RUDOLPH TECHNOLOGIES INC | y83045exv31w2.htm |
| EX-31.1 - EX-31.1 - RUDOLPH TECHNOLOGIES INC | y83045exv31w1.htm |
| 10-K - FORM 10-K - RUDOLPH TECHNOLOGIES INC | y83045e10vk.htm |
Exhibit 21.1
SUBSIDIARIES
|
Name
|
Jurisdiction
|
|
|
Rudolph Technologies Europe, B.V.
|
Netherlands | |
|
Rudolph Technologies Japan KK
|
Japan | |
|
Rudolph Technologies (Shanghai) Trading Co., Ltd.
|
China | |
|
August Technology Corporation
|
Minnesota | |
|
Adventa Control Technologies, Inc.
|
Delaware |