Attached files
| file | filename |
|---|---|
| EX-21.1 - EX-21.1 - RUDOLPH TECHNOLOGIES INC | y83045exv21w1.htm |
| EX-32.1 - EX-32.1 - RUDOLPH TECHNOLOGIES INC | y83045exv32w1.htm |
| EX-23.2 - EX-23.2 - RUDOLPH TECHNOLOGIES INC | y83045exv23w2.htm |
| EX-32.2 - EX-32.2 - RUDOLPH TECHNOLOGIES INC | y83045exv32w2.htm |
| EX-31.2 - EX-31.2 - RUDOLPH TECHNOLOGIES INC | y83045exv31w2.htm |
| EX-31.1 - EX-31.1 - RUDOLPH TECHNOLOGIES INC | y83045exv31w1.htm |
| 10-K - FORM 10-K - RUDOLPH TECHNOLOGIES INC | y83045e10vk.htm |
Exhibit 23.1
Consent
of Independent Registered Public Accounting Firm
The Board of Directors
Rudolph Technologies, Inc.:
We consent to the incorporation by reference in the registration
statements
(No. 333-92443,
333-104349,
333-129774,
333-132283,
333-149705
and
333-163240)
on
Form S-8
of Rudolph Technologies, Inc. of our report dated March 3,
2008, with respect to the consolidated statements of operations,
stockholders’ equity and comprehensive income (loss), and
cash flows of Rudolph Technologies, Inc. and subsidiaries for
the year ended December 31, 2007, and the related
consolidated financial statement schedule.
/s/ KPMG
LLP
Short Hills, New Jersey
March 5, 2010