Attached files
| file | filename |
|---|---|
| EX-21.1 - EX-21.1 - RUDOLPH TECHNOLOGIES INC | y83045exv21w1.htm |
| EX-32.1 - EX-32.1 - RUDOLPH TECHNOLOGIES INC | y83045exv32w1.htm |
| EX-23.1 - EX-23.1 - RUDOLPH TECHNOLOGIES INC | y83045exv23w1.htm |
| EX-32.2 - EX-32.2 - RUDOLPH TECHNOLOGIES INC | y83045exv32w2.htm |
| EX-31.2 - EX-31.2 - RUDOLPH TECHNOLOGIES INC | y83045exv31w2.htm |
| EX-31.1 - EX-31.1 - RUDOLPH TECHNOLOGIES INC | y83045exv31w1.htm |
| 10-K - FORM 10-K - RUDOLPH TECHNOLOGIES INC | y83045e10vk.htm |
Exhibit 23.2
Consent
of Independent Registered Public Accounting Firm
We consent to the incorporation by reference in the following
Registration Statements:
| (1) | Registration Statement (Form S-8 No. 333-163240) pertaining to the Rudolph Technologies, Inc. 2009 Stock Plan and the Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan, | |
| (2) | Registration Statement (Forms S-8 No. 333-149705, No. 333-129773, and No. 333-104349) pertaining to the Rudolph Technologies, Inc. 1999 Stock Plan and the Rudolph Technologies, Inc. 1999 Employee Stock Purchase Plan, | |
| (3) | Registration Statement (Form S-8 No. 333-132283) pertaining to the August Technology Corporate 1997 Stock Incentive Plan, and | |
| (4) | Registration Statement (Form S-8 No. 333-92443) pertaining to the Rudolph Technologies, Inc. 1996 Non-Qualified Stock Option Plan, the Rudolph Technologies, Inc. 1999 Stock Plan and the Rudolph Technologies, Inc. 1999 Employee Stock Purchase Plan; |
of our reports dated March 5, 2010, with respect to the
consolidated financial statements and schedule of Rudolph
Technologies, Inc., and with respect to the effectiveness of
internal control over financial reporting of Rudolph
Technologies, Inc., included in this Annual Report
(Form 10-K)
for the year ended December 31, 2009.
/s/ Ernst &
Young LLP
Metropark, New Jersey
March 5, 2010