Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - FSI INTERNATIONAL INC | d251512d10k.htm |
| EX-23.0 - CONSENT OF KPMG LLP, INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - FSI INTERNATIONAL INC | d251512dex230.htm |
| EX-24.0 - POWERS OF ATTORNEY - FSI INTERNATIONAL INC | d251512dex240.htm |
| EX-31.1 - CERTIFICATION BY PRINCIPAL EXECUTIVE OFFICER PURSUANT TO SECTION 302 - FSI INTERNATIONAL INC | d251512dex311.htm |
| EX-10.5 - FORM OF INCENTIVE STOCK OPTION AGREEMENT - FSI INTERNATIONAL INC | d251512dex105.htm |
| EX-21.0 - SUBSIDIARIES OF THE COMPANY - FSI INTERNATIONAL INC | d251512dex210.htm |
| EX-31.2 - CERTIFICATION BY PRINCIPAL FINANCIAL AND ACCOUNTING OFFICER - FSI INTERNATIONAL INC | d251512dex312.htm |
EXHIBIT 32.1
CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 906 OF
THE SARBANES-OXLEY ACT OF 2002 (18 U.S.C. SECTION 1350)
In connection with the Annual Report of FSI International, Inc., a Minnesota corporation (the “Company”), on Form 10-K for the year ended August 27, 2011 as filed with the Securities and Exchange Commission (the “Report”), each of the undersigned hereby certifies, pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to the undersigned’s knowledge:
(1) The Report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934; and
(2) The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.
Date: November 4, 2011
| /s/ Donald S. Mitchell |
| Donald S. Mitchell |
| Chairman, President and Chief Executive Officer |
| /s/ Patricia M. Hollister |
| Patricia M. Hollister Chief Financial Officer and Assistant Secretary |