Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - FSI INTERNATIONAL INC | d251512d10k.htm |
| EX-24.0 - POWERS OF ATTORNEY - FSI INTERNATIONAL INC | d251512dex240.htm |
| EX-31.1 - CERTIFICATION BY PRINCIPAL EXECUTIVE OFFICER PURSUANT TO SECTION 302 - FSI INTERNATIONAL INC | d251512dex311.htm |
| EX-32.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER PURSUANT TO 18 U.S.C. SECTION 1350 - FSI INTERNATIONAL INC | d251512dex321.htm |
| EX-10.5 - FORM OF INCENTIVE STOCK OPTION AGREEMENT - FSI INTERNATIONAL INC | d251512dex105.htm |
| EX-21.0 - SUBSIDIARIES OF THE COMPANY - FSI INTERNATIONAL INC | d251512dex210.htm |
| EX-31.2 - CERTIFICATION BY PRINCIPAL FINANCIAL AND ACCOUNTING OFFICER - FSI INTERNATIONAL INC | d251512dex312.htm |
EXHIBIT 23.0
Consent of Independent Registered Public Accounting Firm
The Board of Directors
FSI International, Inc.:
We consent to the incorporation by reference in the registration statements on Form S-8 (Nos. 33-33647, 33-39920, 33-46296, 33-77852, 333-19677, 333-50991, 333-96275, 333-61164, 333-104088, 333-113735, 333-122729, 333-149852, 333-158517, 333-165955 and 333-173310) and on Form S-3 (Nos. 333-86148 and 333-165785) of FSI International, Inc. of our report dated November 4, 2011, with respect to the consolidated balance sheets of FSI International, Inc. and subsidiaries as of August 27, 2011 and August 28, 2010 and the related consolidated statements of operations, stockholders’ equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended August 27, 2011, and the effectiveness of internal control over financial reporting as of August 27, 2011, which report appears in the August 27, 2011 annual report on Form 10-K of FSI International, Inc.
/s/ KPMG LLP
Minneapolis, Minnesota
November 4, 2011