Attached files

file filename
10-K - FORM 10-K - FSI INTERNATIONAL INCd251512d10k.htm
EX-23.0 - CONSENT OF KPMG LLP, INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - FSI INTERNATIONAL INCd251512dex230.htm
EX-24.0 - POWERS OF ATTORNEY - FSI INTERNATIONAL INCd251512dex240.htm
EX-31.1 - CERTIFICATION BY PRINCIPAL EXECUTIVE OFFICER PURSUANT TO SECTION 302 - FSI INTERNATIONAL INCd251512dex311.htm
EX-32.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER PURSUANT TO 18 U.S.C. SECTION 1350 - FSI INTERNATIONAL INCd251512dex321.htm
EX-10.5 - FORM OF INCENTIVE STOCK OPTION AGREEMENT - FSI INTERNATIONAL INCd251512dex105.htm
EX-31.2 - CERTIFICATION BY PRINCIPAL FINANCIAL AND ACCOUNTING OFFICER - FSI INTERNATIONAL INCd251512dex312.htm

EXHIBIT 21.0

SUBSIDIARIES

 

NAME

  

JURISDICTION OF

INCORPORATION

FSI International Asia, Ltd.    Taiwan
FSI International (France) SARL    France
FSI International (Germany) GmbH    Germany
FSI International (Italy) S.r.l.    Italy
FSI International Netherlands B.V.    The Netherlands
FSI International (Holding) B.V.    The Netherlands
FSI International (UK) Limited    Scotland
FSI International (Shanghai) Co., Ltd.    Peoples Republic of China
FSI International (Korea) Co., Ltd.    Korea
FSI International Semiconductor Equipment Pte Ltd    Singapore
FSI International Israel, Ltd.    Israel
SCD Mountain View, Inc.    Minnesota
Semiconductor Systems, Inc.    California

FSI International, Inc. also owns a 20% interest in Apprecia Technology, Inc.