Attached files

file filename
10-K - FORM 10-K - ENTEGRIS INCd10k.htm
EX-23 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - ENTEGRIS INCdex23.htm
EX-21 - SUBSIDIARIES OF ENTEGRIS, INC. - ENTEGRIS INCdex21.htm
EX-24 - POWER OF ATTORNEY BY THE DIRECTORS OF ENTEGRIS, INC. - ENTEGRIS INCdex24.htm
EX-10.1 - THIRTEENTH AMENDMENT TO ENTEGRIS, INC. 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex101.htm
EX-32.2 - CERTIFICATION REQUIRED BY RULE 13A-14(B) AND 18 U.S.C. SECTION 1350 - ENTEGRIS INCdex322.htm
EX-31.1 - CERTIFICATION REQUIRED BY RULE 13A-14(A) IN ACCORDANCE WITH SECTION 302 - ENTEGRIS INCdex311.htm
EX-31.2 - CERTIFICATION REQUIRED BY RULE 13A-14(A) IN ACCORDANCE WITH SECTION 302 - ENTEGRIS INCdex312.htm

Exhibit 32.1

CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO SECTION 906

OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K (the “Report”) of Entegris, Inc, a Delaware corporation (the “Company”), for the fiscal year ended December 31, 2010 as filed with the Securities and Exchange Commission on the date hereof, I, Gideon Argov, Chief Executive Officer of the Company, hereby certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002 that:

 

  (1) The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

 

  (2) The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

Date: February 24, 2011

 

/s/ Gideon Argov

Gideon Argov
Chief Executive Officer