ENTEGRIS INC - FORM 10-K - EX-23 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - February 24, 2011

Attached files

file filename
10-K - FORM 10-K - ENTEGRIS INCd10k.htm
EX-21 - SUBSIDIARIES OF ENTEGRIS, INC. - ENTEGRIS INCdex21.htm
EX-24 - POWER OF ATTORNEY BY THE DIRECTORS OF ENTEGRIS, INC. - ENTEGRIS INCdex24.htm
EX-10.1 - THIRTEENTH AMENDMENT TO ENTEGRIS, INC. 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex101.htm
EX-32.2 - CERTIFICATION REQUIRED BY RULE 13A-14(B) AND 18 U.S.C. SECTION 1350 - ENTEGRIS INCdex322.htm
EX-31.1 - CERTIFICATION REQUIRED BY RULE 13A-14(A) IN ACCORDANCE WITH SECTION 302 - ENTEGRIS INCdex311.htm
EX-32.1 - CERTIFICATION REQUIRED BY RULE 13A-14(B) AND 18 U.S.C. SECTION 1350 - ENTEGRIS INCdex321.htm
EX-31.2 - CERTIFICATION REQUIRED BY RULE 13A-14(A) IN ACCORDANCE WITH SECTION 302 - ENTEGRIS INCdex312.htm

Exhibit 23

Consent of Independent Registered Public Accounting Firm

The Board of Directors and Shareholders

Entegris, Inc.:

We consent to the incorporation by reference in the registration statements (Nos. 333-160212 and 333-105962) on Form S-3 and (Nos. 333-167178, 333-127599 and 333-53382) on Form S-8 of Entegris, Inc. of our report dated February 24, 2011, with respect to the consolidated balance sheets of Entegris, Inc. as of December 31, 2010 and 2009, and the related consolidated statements of operations, equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended December 31, 2010 and the effectiveness of internal control over financial reporting as of December 31, 2010, which report appears in the December 31, 2010 annual report on Form 10-K of Entegris, Inc.

/s/ KPMG LLP

Minneapolis, Minnesota

February 24, 2011

ENTEGRIS INC Reports

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