Attached files
| file | filename |
|---|---|
| 10-K - ANNUAL REPORT - AMTECH SYSTEMS INC | amtech_10k.htm |
| EX-32.2 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INC | exhibit32-2.htm |
| EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - AMTECH SYSTEMS INC | exhibit21-1.htm |
| EX-24.1 - POWERS OF ATTORNEY - AMTECH SYSTEMS INC | exhibit24-1.htm |
| EX-32.1 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INC | exhibit32-1.htm |
| EX-31.2 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INC | exhibit31-2.htm |
| EX-31.1 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INC | exhibit31-1.htm |
Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
As independent registered public accountants, we hereby consent to the incorporation by reference in the Registration Statements Nos. 333-09917, 333-10117, 333-47098 and 333-131044 on Form S-3 and Nos. 333-09911, 333-09909, 333-46086, 333-76812, 333-103101, 333-131051 and 333-145454 on Form S-8 of our report dated November 24, 2009, relating to the consolidated financial statements of Amtech Systems, Inc. as of September 30, 2009 and September 30, 2008 and the related consolidated statements of operations, stockholders’ equity and comprehensive income (loss), and cash flows for each of the years in the three year period ended September 30, 2009, included in the 2009 Annual Report on Form 10-K of Amtech Systems, Inc.
| /s/ Mayer Hoffman McCann P.C. |
Phoenix, Arizona
November 24,
2009
76