Attached files
file | filename |
---|---|
EX-32.2 - EX-32.2 - AMTECH SYSTEMS INC | asys-ex322_10.htm |
EX-32.1 - EX-32.1 - AMTECH SYSTEMS INC | asys-ex321_12.htm |
EX-31.2 - EX-31.2 - AMTECH SYSTEMS INC | asys-ex312_6.htm |
EX-31.1 - EX-31.1 - AMTECH SYSTEMS INC | asys-ex311_7.htm |
EX-24 - EX-24 - AMTECH SYSTEMS INC | asys-ex24_9.htm |
EX-23.1 - EX-23.1 - AMTECH SYSTEMS INC | asys-ex231_11.htm |
EX-21.1 - EX-21.1 - AMTECH SYSTEMS INC | asys-ex211_8.htm |
EX-4.2 - EX-4.2 - AMTECH SYSTEMS INC | asys-ex42_13.htm |
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