AMTECH SYSTEMS INC - FORM 10-K - EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - November 24, 2009

Attached files

file filename
10-K - ANNUAL REPORT - AMTECH SYSTEMS INCamtech_10k.htm
EX-32.2 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INCexhibit32-2.htm
EX-24.1 - POWERS OF ATTORNEY - AMTECH SYSTEMS INCexhibit24-1.htm
EX-32.1 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INCexhibit32-1.htm
EX-23.1 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - AMTECH SYSTEMS INCexhibit23-1.htm
EX-31.2 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INCexhibit31-2.htm
EX-31.1 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INCexhibit31-1.htm

Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT

Name         Jurisdiction in which incorporated
Tempress Systems, Inc.   State of Texas
 
Tempress Holdings B.V.   The Netherlands
 
Tempress Systems B.V.   The Netherlands
 
Tempress Manufacturing B.V.   The Netherlands
 
Tempress Engineering B.V.   The Netherlands
 
Tempress Onroerend Goed B.V   The Netherlands
 
P.R. Hoffman Machine Products, Inc   State of Arizona
 
Bruce Technologies, Inc   State of Massachusetts
 
Bruce Technologies Europe GmbH   Federal Republic of Germany
 
R2D Automation SAS   France

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