ENTEGRIS INC - FORM 10-K - EX-21 - February 5, 2021

Attached files

file filename
10-K - 10-K - ENTEGRIS INCentg-20201231.htm
EX-32.2 - EX-32.2 - ENTEGRIS INCentg-12312020xex322.htm
EX-32.1 - EX-32.1 - ENTEGRIS INCentg-12312020xex321.htm
EX-31.2 - EX-31.2 - ENTEGRIS INCentg-12312020xex312.htm
EX-31.1 - EX-31.1 - ENTEGRIS INCentg-12312020xex311.htm
EX-24 - EX-24 - ENTEGRIS INCentg-12312020xex24.htm
EX-23 - EX-23 - ENTEGRIS INCentg-12312020xex23.htm
EX-10.4 - EX-10.4 - ENTEGRIS INCexhibit104-stockoptiongran.htm
EX-10.3 - EX-10.3 - ENTEGRIS INCexhibit103-rsuawardagreeme.htm
EX-10.2 - EX-10.2 - ENTEGRIS INCexhibit102-performanceshar.htm
EX-10.1 - EX-10.1 - ENTEGRIS INCexhibit101-rsuawardagreeme.htm

Exhibit 21

Subsidiaries of Entegris, Inc.

Name of SubsidiaryJurisdiction
ATMI International Trading Co. Ltd.China
ATMI Semiconductor New Materials Xi'an Co., Ltd.China
Digital Specialty Chemicals LimitedCanada
Digital Specialty Chemicals, Inc.New Hampshire
Digital Specialty Chemicals UK LimitedUnited Kingdom
Digital Specialty Chemicals LTDKorea
Entegris Asia LLCDelaware
Entegris Asia Pte. Ltd.Singapore
Entegris Ecosys LLCDelaware
Entegris GmbHGermany
Entegris GP, Inc.Delaware
Entegris International Holdings B.V.The Netherlands
Entegris International Holdings II B.V.The Netherlands
Entegris International Holdings III B.V.The Netherlands
Entegris International Holdings IV LLCDelaware
Entegris International Holdings V LLCDelaware
Entegris International Holdings VI LLCDelaware
Entegris International Holdings VII LLCThe Netherlands
Entegris International Holdings, Inc.Delaware
Entegris Ireland Unlimited CompanyIreland
Entegris Israel Ltd.Israel
Entegris Japan Co. Ltd.Japan
Entegris Korea Co., Ltd.South Korea
Entegris Korea II Ltd.South Korea
Entegris Malaysia Sdn. Bhd.Malaysia
Entegris (Shanghai) Microelectronics Trading Company Ltd.China
Entegris Pacific Ltd.Delaware
Entegris Professional Solutions, Inc.Delaware
Entegris SarlLuxembourg
Entegris SASFrance
Entegris Singapore Pte. Ltd.Singapore
Entegris Specialty Materials, LLCDelaware
Entegris Taiwan Enterprises PartnershipTaiwan
Entegris Taiwan Holdings, Inc.Delaware
Entegris Taiwan Technologies Co. Ltd.Taiwan
Hangzhou Anow Microfiltration Co., Ltd.China
Hangzhou AiNuo Microfiltration Co., Ltd.China
Nihon Entegris G.K.Japan
Poco Graphite, Inc.Delaware



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