Attached files
| file | filename |
|---|---|
| EX-32.1 - EX-32.1 - ONTO INNOVATION INC. | nano-ex321_8.htm |
| EX-31.2 - EX-31.2 - ONTO INNOVATION INC. | nano-ex312_6.htm |
| EX-31.1 - EX-31.1 - ONTO INNOVATION INC. | nano-ex311_10.htm |
| EX-21.1 - EX-21.1 - ONTO INNOVATION INC. | nano-ex211_9.htm |
| EX-10.24 - EX-10.24 - ONTO INNOVATION INC. | nano-ex1024_34.htm |
| EX-10.23 - EX-10.23 - ONTO INNOVATION INC. | nano-ex1023_36.htm |
| EX-10.22 - EX-10.22 - ONTO INNOVATION INC. | nano-ex1022_37.htm |
| EX-10.21 - EX-10.21 - ONTO INNOVATION INC. | nano-ex1021_35.htm |
| EX-10.20 - EX-10.20 - ONTO INNOVATION INC. | nano-ex1020_38.htm |
| 10-K - 10-K - ONTO INNOVATION INC. | nano-10k_20171230.htm |
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557, 333-149339, 333-164088, 333-176502, 333-192183, 333-213277, and 333-220135) and on Form S-3 (No. 333-163168) of Nanometrics Incorporated of our report dated February 26, 2018 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.
/s/ PricewaterhouseCoopers LLP
San Jose, California
February 26, 2018