Attached files

file filename
EX-21.1 - EXHIBIT 21.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit211.htm
10-K - 10-K - RUDOLPH TECHNOLOGIES INCrtec10k12312016.htm
EX-32.2 - EXHIBIT 32.2 - RUDOLPH TECHNOLOGIES INCa12312016exhibit322.htm
EX-31.2 - EXHIBIT 31.2 - RUDOLPH TECHNOLOGIES INCa12312016exhibit312.htm
EX-31.1 - EXHIBIT 31.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit311.htm
EX-23.1 - EXHIBIT 23.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit231.htm
EX-10.12 - EXHIBIT 10.12 - RUDOLPH TECHNOLOGIES INCa12312016exhibit1012.htm


Exhibit 32.1
 
CERTIFICATION OF CHIEF EXECUTIVE OFFICER
PURSUANT TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

 
I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that the Annual Report of Rudolph Technologies, Inc. on Form 10-K for the year ended December 31, 2016 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934 and that information contained in such Annual Report on Form 10-K fairly presents in all material respects the financial condition and results of operations of Rudolph Technologies, Inc.
 

Date: February 16, 2017

 
 
By: 
/s/  MICHAEL P. PLISINSKI
 
 
Michael P. Plisinski
Chairman and Chief Executive Officer