Attached files

file filename
10-K - 10-K - RUDOLPH TECHNOLOGIES INCrtec10k12312016.htm
EX-32.2 - EXHIBIT 32.2 - RUDOLPH TECHNOLOGIES INCa12312016exhibit322.htm
EX-32.1 - EXHIBIT 32.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit321.htm
EX-31.2 - EXHIBIT 31.2 - RUDOLPH TECHNOLOGIES INCa12312016exhibit312.htm
EX-31.1 - EXHIBIT 31.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit311.htm
EX-23.1 - EXHIBIT 23.1 - RUDOLPH TECHNOLOGIES INCa12312016exhibit231.htm
EX-10.12 - EXHIBIT 10.12 - RUDOLPH TECHNOLOGIES INCa12312016exhibit1012.htm


Exhibit 21.1

SUBSIDIARIES
Name
 
Jurisdiction
Rudolph Technologies Europe, B.V.
 
Netherlands
Rudolph Technologies Japan KK
 
Japan
Rudolph Technologies (Shanghai) Trading Co., Ltd.
 
China
Rudolph Technologies Germany GmbH
 
Germany
Azores Corp.
 
Delaware
Azores Asia Limited
 
Hong Kong