Attached files
| file | filename |
|---|---|
| EX-32.2 - EXHIBIT 32.2 - AMTECH SYSTEMS INC | asys-ex322x93016.htm |
| EX-32.1 - EXHIBIT 32.1 - AMTECH SYSTEMS INC | asys-ex321x93016.htm |
| EX-31.2 - EXHIBIT 31.2 - AMTECH SYSTEMS INC | asys-ex312x93016.htm |
| EX-31.1 - EXHIBIT 31.1 - AMTECH SYSTEMS INC | asys-ex311x93016.htm |
| EX-24.1 - EXHIBIT 24.1 - AMTECH SYSTEMS INC | asys-ex241x93016.htm |
| EX-21.1 - EXHIBIT 21.1 - AMTECH SYSTEMS INC | asys-ex211x93016.htm |
| 10-K - 10-K - AMTECH SYSTEMS INC | asys-93016x10k.htm |
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTANTS
As independent registered public accountants, we hereby consent to the incorporation by reference in the Registration Statements Nos. 333-139592, 333-140372, 333-146856, and 333-147440 on Form S-1, Nos. 333-09917, 333-10117, 333-47098, and 333-131044 on Form S-3, Nos. 333-09909, 333-09911, 333-46086, 333-76812, 333-103101, 333-131051, 333-145454, 333-168606, 333-168607, 333-196937, 333-196940, and 333-204431 on Form S-8 and No. 333-200558 on Form S-4 of our reports dated November 30, 2016, with respect to the consolidated financial statements of Amtech Systems, Inc. as of September 30, 2016 and 2015 and for the years ended September 30, 2016, 2015, and 2014, and with respect to the effectiveness of internal control over financial reporting as of September 30, 2016, included in this Annual Report on Form 10-K.
/s/ MAYER HOFFMAN MCCANN P.C. | |
Phoenix, Arizona | |
November 30, 2016 | |