Attached files
| file | filename |
|---|---|
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2227592z10-k.htm |
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2227592zf1_10-03.pdf |
| EX-10.12 - EX-10.12 - AXCELIS TECHNOLOGIES INC | a2227592zex-10_12.htm |
| EX-10.13 - EX-10.13 - AXCELIS TECHNOLOGIES INC | a2227592zex-10_13.htm |
| EX-23.1 - EX-23.1 - AXCELIS TECHNOLOGIES INC | a2227592zex-23_1.htm |
| EX-31.1 - EX-31.1 - AXCELIS TECHNOLOGIES INC | a2227592zex-31_1.htm |
| EX-31.2 - EX-31.2 - AXCELIS TECHNOLOGIES INC | a2227592zex-31_2.htm |
| EX-32.1 - EX-32.1 - AXCELIS TECHNOLOGIES INC | a2227592zex-32_1.htm |
| EX-32.2 - EX-32.2 - AXCELIS TECHNOLOGIES INC | a2227592zex-32_2.htm |
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Axcelis Technologies, Inc.
Exhibit 21.1 to Form 10-K for the year ended December 31, 2015
Subsidiaries
The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:
Domestic Subsidiaries
- 1.
- Axcelis Technologies (Israel) Inc., a Delaware corporation
European Subsidiaries
- 2.
- Axcelis
Technologies GmbH (Germany)
- 3.
- Axcelis
Technologies, Srl (Italy)
- 4.
- Axcelis Technologies, Sarl (France)
Asian Subsidiaries
- 5.
- Axcelis
Technologies, KK (Japan)
- 6.
- Axcelis
Technologies Limited (Korea)
- 7.
- Axcelis
Technologies, Ltd. (Taiwan)
- 8.
- Axcelis
Technologies Pte. Ltd. (Singapore)
- 9.
- Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China)
1
Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2015 Subsidiaries