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10-K - 10-K - AXCELIS TECHNOLOGIES INCa2227592z10-k.htm
10-K - 10-K - AXCELIS TECHNOLOGIES INCa2227592zf1_10-03.pdf
EX-10.12 - EX-10.12 - AXCELIS TECHNOLOGIES INCa2227592zex-10_12.htm
EX-21.1 - EX-21.1 - AXCELIS TECHNOLOGIES INCa2227592zex-21_1.htm
EX-23.1 - EX-23.1 - AXCELIS TECHNOLOGIES INCa2227592zex-23_1.htm
EX-31.1 - EX-31.1 - AXCELIS TECHNOLOGIES INCa2227592zex-31_1.htm
EX-31.2 - EX-31.2 - AXCELIS TECHNOLOGIES INCa2227592zex-31_2.htm
EX-32.1 - EX-32.1 - AXCELIS TECHNOLOGIES INCa2227592zex-32_1.htm
EX-32.2 - EX-32.2 - AXCELIS TECHNOLOGIES INCa2227592zex-32_2.htm

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Exhibit 10.13

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 4, 2016

        This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows:

Annual Cash Retainers, paid quarterly in advance
   
 

Board Member Retainer

  $ 50,000  

Independent Chairman Premium

  $ 20,000  

Committee Chairman Retainers

       

Audit Committee Chairman

  $ 15,000  

Compensation Committee Chairman

  $ 10,000  

Nominating and Governance Committee Chairman

  $ 7,500  

Technology Committee Chairman

  $ 7,500  

Committee Member (not Chairman) Retainers

       

Audit Committee Member

  $ 10,000  

Compensation Committee Member

  $ 7,500  

Nominating and Governance Committee Member

  $ 5,000  

Technology Committee Member

  $ 5,000  

        Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

        The Board of Directors may, from time to time, form committees in addition to the Audit, Compensation, Nominating and Governance and Technology Committees and set compensation for service on such additional committees.

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Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at March 4, 2016