Attached files
| file | filename |
|---|---|
| EXCEL - IDEA: XBRL DOCUMENT - MATTSON TECHNOLOGY INC | Financial_Report.xls |
| EX-32.1 - EXHIBIT 32.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex321.htm |
| EX-23.2 - EXHIBIT 23.2 - MATTSON TECHNOLOGY INC | mtsn20141231-ex232.htm |
| EX-31.2 - EXHIBIT 31.2 - MATTSON TECHNOLOGY INC | mtsn20141231-ex312.htm |
| 10-K - 10-K - MATTSON TECHNOLOGY INC | mtsn201410k.htm |
| EX-21.1 - EXHIBIT 21.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex211.htm |
| EX-31.1 - EXHIBIT 31.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex311.htm |
EXHIBIT 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in this Annual Report on Form 10-K of Mattson Technology, Inc. for the year ended December 31, 2014 of our report dated March 12, 2015 included in its Registration Statements on Form S-3 (No. 333-191686) and Form S-8 (Nos. 333-39129, 333-59859, 333-87715, 333-41954, 333-54010, 333-63156, 333-100094, 333-113683, 333-119799, 333-128529, 333-130419 and 333-183742) relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting for the year ended December 31, 2014 listed in the accompanying index.
/s/ Armanino LLP
San Ramon, California
March 12, 2015