Attached files
| file | filename |
|---|---|
| EXCEL - IDEA: XBRL DOCUMENT - MATTSON TECHNOLOGY INC | Financial_Report.xls |
| EX-32.1 - EXHIBIT 32.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex321.htm |
| EX-23.2 - EXHIBIT 23.2 - MATTSON TECHNOLOGY INC | mtsn20141231-ex232.htm |
| EX-23.1 - EXHIBIT 23.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex231.htm |
| EX-31.2 - EXHIBIT 31.2 - MATTSON TECHNOLOGY INC | mtsn20141231-ex312.htm |
| 10-K - 10-K - MATTSON TECHNOLOGY INC | mtsn201410k.htm |
| EX-31.1 - EXHIBIT 31.1 - MATTSON TECHNOLOGY INC | mtsn20141231-ex311.htm |
MATTSON TECHNOLOGY, INC.
SUBSIDIARIES OF THE REGISTRANT
Mattson International, Inc.
Mattson Technology Holdings, LLC
Mattson International Korea Co.
Mattson Technology Singapore Pte. Ltd.
Mattson International, Inc. Taiwan Branch *
Mattson Technology Holding GmbH
Mattson International GmbH
Mattson Thermal Products GmbH
Mattson International France Sarl
Mattson Trading (Shanghai) Co., Ltd.
Mattson Technology Cayman Holdings, Ltd.
Mattson Technology Canada, Inc.
Mattson Technology Israel Ltd.
* Note: this is not a subsidiary, but a branch registration