Attached files
| file | filename |
|---|---|
| EX-23 - EXHIBIT 23 - ENTEGRIS INC | entg-12312014xex23.htm |
| EX-24 - EXHIBIT 24 - ENTEGRIS INC | entg-12312014xex24.htm |
| EX-32.2 - EXHIBIT 32.2 - ENTEGRIS INC | entg-12312014xex322.htm |
| EX-10.1 - EXHIBIT 10.1 - ENTEGRIS INC | entg-12312014xex101.htm |
| EX-10.4 - EXHIBIT 10.4 - ENTEGRIS INC | entg-12312014xex104.htm |
| EX-10.3 - EXHIBIT 10.3 - ENTEGRIS INC | entg-12312014xex103.htm |
| EX-32.1 - EXHIBIT 32.1 - ENTEGRIS INC | entg-12312014xex321.htm |
| EX-10.5 - EXHIBIT 10.5 - ENTEGRIS INC | entg-12312014xex105.htm |
| EX-31.1 - EXHIBIT 31.1 - ENTEGRIS INC | entg-12312014xex311.htm |
| EX-31.2 - EXHIBIT 31.2 - ENTEGRIS INC | entg-12312014xex312.htm |
| EXCEL - IDEA: XBRL DOCUMENT - ENTEGRIS INC | Financial_Report.xls |
| 10-K - 10-K - ENTEGRIS INC | entg-12312014x10k.htm |
| EX-10.2 - EXHIBIT 10.2 - ENTEGRIS INC | entg-12312014xex102.htm |
Exhibit 21
Subsidiaries of Entegris, Inc.
Name of Subsidiary | Jurisdiction |
Entegris-Jetalon Solutions, Inc. | Delaware |
Entegris Korea Ltd. | South Korea |
Pureline Co. Ltd. (1) | South Korea |
Entegris Korea II Ltd. | South Korea |
Entegris International Holdings IV LLC | Delaware |
Entegris Pacific Ltd. | Delaware |
Entegris (Shanghai) Microelectronics Trading Company Ltd. | Peoples Republic of China |
Entegris Malaysia Sdn. Bhd. | Malaysia |
ATMI Malaysia Sdn. Bhd. | Malaysia |
Entegris International Holdings B.V. | The Netherlands |
Entegris International Holdings II B.V. | The Netherlands |
Entegris Asia Pte. Ltd. | Singapore |
Entegris GmbH (2) | Germany |
ATMI GmbH | Germany |
Entegris Ireland Ltd. | Ireland |
ATMI Ecosys LLC | California |
ATMI Korea Co. Ltd. | South Korea |
ATMI Pte. Ltd. | Singapore |
Entegris Singapore Pte. Ltd. | Singapore |
Entegris Pte. Ltd. | Singapore |
Entegris SAS | France |
Entegris Israel Ltd. | Israel |
Entegris Cleaning Process SAS | France |
Entegris International Holdings III B.V. | The Netherlands |
Entegris Taiwan Enterprise Partnership (3) | Taiwan |
Entegris Asia LLC | Delaware |
Entegris Taiwan Technologies Co. Ltd. | Taiwan |
Nihon Entegris K.K. | Japan |
Entegris Japan Co. Ltd. | Japan |
Entegris Specialty Materials, LLC | Delaware |
Poco Graphite, Inc. | Delaware |
Poco Graphite International, Inc. | Delaware |
Poco Graphite SARL (4) | France |
ATMI Inc. | Delaware |
Advanced Technology Materials, Inc. | Delaware |
ATMI Packaging LLC | Delaware |
ATMI Materials LLC | Delaware |
Entegris International Holdings V LLC | Delaware |
ATMI International Holdings, Inc. | Delaware |
ATMI Belgium Holdings, Inc. | Delaware |
Entegris International Holdings VI LLC | Delaware |
ATMI Sarl | Luxembourg |
ATMI Belgium LLC | Delaware |
ATMI Taiwan Holdings, Inc. | Delaware |
ATMI Taiwan Co., Ltd. | Taiwan |
ATMI Semiconductor New Materials Xi'an Co., Ltd. | China |
ATMI International Trading Co. Ltd. | China |
ATMI Clean Technologies (Shanghai) Company Limited | China |
ATMI Japan K.K. | Japan |
(1) | Owned 37.5% by Entegris Korea Ltd. and 62.5% by registrant |
(2) | Owned 90% by Entegris International Holdings B.V. and 10% by registrant |
(3) | Owned 99% by Entegris International Holdings B.V. and 1% by registrant |
(4) | Owned 90% by Poco Graphite, Inc. and 10% by Poco Graphite International, Inc. |