Attached files
| file | filename |
|---|---|
| 10-K - 10-K - VEECO INSTRUMENTS INC | a14-24979_110k.htm |
| EX-2.1 - EX-2.1 - VEECO INSTRUMENTS INC | a14-24979_1ex2d1.htm |
| EX-32.2 - EX-32.2 - VEECO INSTRUMENTS INC | a14-24979_1ex32d2.htm |
| EX-32.1 - EX-32.1 - VEECO INSTRUMENTS INC | a14-24979_1ex32d1.htm |
| EX-31.1 - EX-31.1 - VEECO INSTRUMENTS INC | a14-24979_1ex31d1.htm |
| EX-31.2 - EX-31.2 - VEECO INSTRUMENTS INC | a14-24979_1ex31d2.htm |
| EX-23.1 - EX-23.1 - VEECO INSTRUMENTS INC | a14-24979_1ex23d1.htm |
| EXCEL - IDEA: XBRL DOCUMENT - VEECO INSTRUMENTS INC | Financial_Report.xls |
Exhibit 21.1
Subsidiaries of the Registrant
|
Subsidiary |
|
Jurisdiction of Organization |
|
U.S. Subsidiaries |
|
|
|
Veeco ALD Inc. |
|
DE |
|
Veeco APAC Inc. |
|
DE |
|
Veeco Process Equipment Inc. |
|
DE |
|
Veeco TK LLC |
|
DE |
|
SP PE VII-B, SSEC Blocker Corp. |
|
DE |
|
SP SD IV-B, SSEC Blocker Corp. |
|
DE |
|
Solid State Equipment Holdings LLC |
|
DE |
|
Solid State Equipment LLC |
|
DE |
|
SSEC Asia, LLC |
|
PA |
|
|
|
|
|
Foreign Subsidiaries |
|
|
|
Veeco ALD Korea Ltd. |
|
South Korea |
|
Veeco Asia Pte. Ltd. |
|
Singapore |
|
Veeco Malaysia Sdn. Bhd. |
|
Malaysia |
|
Veeco Korea LLC |
|
South Korea |
|
Veeco Instruments GmbH |
|
Germany |
|
SSEC GmbH |
|
Germany |
|
Veeco Instruments Limited |
|
England |
|
Veeco Instruments (Shanghai) Co. Ltd. |
|
China |
|
Veeco Taiwan Inc. |
|
Taiwan |