Attached files
file | filename |
---|---|
EX-31.1 - CERTIFICATION - AMTECH SYSTEMS INC | asys-ex311x93014.htm |
EX-24.1 - POWER OF ATTORNEY - AMTECH SYSTEMS INC | asys-ex24x93014.htm |
EX-32.1 - CERTIFICATION - AMTECH SYSTEMS INC | asys-ex321x93014.htm |
EX-31.2 - CERTIFICATION - AMTECH SYSTEMS INC | asys-ex312x93014.htm |
EX-32.2 - CERTIFICATION - AMTECH SYSTEMS INC | asys-ex322x93014.htm |
EXCEL - IDEA: XBRL DOCUMENT - AMTECH SYSTEMS INC | Financial_Report.xls |
10-K - 10-K - AMTECH SYSTEMS INC | asys-93014x10k.htm |
EX-23.1 - CONSENT OF INDEPENDENT REGISTERED ACCOUNTANTS - AMTECH SYSTEMS INC | asys-ex231x93014.htm |
Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name | Jurisdiction in which incorporated | |
Tempress Systems, Inc. | State of Texas | |
Tempress Group Holding BV | The Netherlands | |
Tempress Holdings BV | The Netherlands | |
Tempress Systems BV | The Netherlands | |
Tempress Manufacturing BV | The Netherlands | |
Tempress Engineering BV | The Netherlands | |
Tempress Onroerend Goed BV | The Netherlands | |
Tempress IP BV | The Netherlands | |
Tempress Asia Holding BV | The Netherlands | |
Tempress Hong Kong Limited | Hong Kong | |
P.R. Hoffman Machine Products, Inc | State of Arizona | |
Bruce Technologies, Inc | State of Massachusetts | |
Bruce Technologies Europe GmbH | Federal Republic of Germany | |
R2D Automation SAS | France | |
Shanghai Kingstone Semiconductor Limited | China | |
Kingstone Technology Hong Kong Limited | Hong Kong | |
Wuxi KingCore Technology Company Limited | China | |
Amtech Tempress New Energy Technologies Limited | China |