Attached files
| file | filename |
|---|---|
| EXCEL - IDEA: XBRL DOCUMENT - ATMI INC | Financial_Report.xls |
| 10-K - 10-K - ATMI INC | d301173d10k.htm |
| EX-32 - EX-32 - ATMI INC | d301173dex32.htm |
| EX-23 - EX-23 - ATMI INC | d301173dex23.htm |
| EX-31.1 - EX-31.1 - ATMI INC | d301173dex311.htm |
| EX-31.2 - EX-31.2 - ATMI INC | d301173dex312.htm |
| EX-10.52 - EX-10.52 - ATMI INC | d301173dex1052.htm |
Exhibit 21
ATMI, INC.
Subsidiaries
| Entity |
State or Jurisdiction of Incorporation or Organization | |
| Advanced Technology Materials, Inc. |
Delaware | |
| ATMI Ecosys Corporation |
California | |
| Advanced Delivery & Chemical Systems Nevada, Inc. |
Nevada | |
| Advanced Delivery & Chemical Systems Holdings, LLC |
Delaware | |
| Advanced Delivery & Chemical Systems Operating, LLC |
Delaware | |
| Advanced Delivery & Chemical Systems Manager, Inc. |
Delaware | |
| ATMI Materials, Ltd. |
Texas | |
| ATMI Korea Co., Ltd. |
South Korea | |
| ATMI Packaging, Inc. |
Minnesota | |
| ATMI International Holdings, Inc. |
Delaware | |
| ATMI Taiwan Holdings, Inc. |
Delaware | |
| ATMI Belgium Holdings, Inc. |
Delaware | |
| ATMI Belgium, LLC |
Delaware | |
| ATMI BVBA |
Belgium | |
| ATMI International Trading Co., Ltd. |
China | |
| ATMI Clean Technologies (Shanghai) Co,. Ltd |
China | |
| ATMI Japan KK |
Japan | |
| ATMI Taiwan Co., Ltd. |
Taiwan | |
| ATMI GmbH |
Germany | |
| ATMI PTE Ltd |
Singapore | |
| ATMI Acquisition BVBA |
Belgium | |
| ATMI SARL |
Luxembourg | |
| Artelis, S.A. |
Belgium |