ONTO INNOVATION INC. - FORM 10-K - EX-23.1 - CONSENT OF PRICEWATERHOUSECOOPERS LLP - March 11, 2011

Attached files

file filename
10-K - FORM 10-K - ONTO INNOVATION INC.d10k.htm
EX-31.2 - CERTIFICATION OF PFO AND PAO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex312.htm
EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - ONTO INNOVATION INC.dex211.htm
EX-32.1 - CERTIFICATION OF PEO AND PFO PURSUANT TO SECTION 906 - ONTO INNOVATION INC.dex321.htm
EX-23.2 - CONSENT OF BDO USA, LLP - ONTO INNOVATION INC.dex232.htm
EX-31.1 - CERTIFICATION OF PEO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex311.htm
EX-10.21 - EMPLOYMENT AGREEMENT BETWEEN REGISTRANT AND RONALD W. KISLING - ONTO INNOVATION INC.dex1021.htm
EX-10.20 - FORM OF OFFER LETTER TO RONALD W. KISLING - ONTO INNOVATION INC.dex1020.htm

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557, 333-149339 and 333-164088) and on Form S-3 (No. 333-163168) of Nanometrics, Inc. of our report dated March 11, 2011 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.

/s/ PricewaterhouseCoopers LLP

San Jose, CA

March 11, 2011

ONTO INNOVATION INC. Reports

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