Attached files

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10-K - 10-K - VEECO INSTRUMENTS INCa2202112z10-k.htm
EX-3.8 - EX-3.8 - VEECO INSTRUMENTS INCa2202112zex-3_8.htm
EX-32.1 - EX-32.1 - VEECO INSTRUMENTS INCa2202112zex-32_1.htm
EX-31.2 - EX-31.2 - VEECO INSTRUMENTS INCa2202112zex-31_2.htm
EX-31.1 - EX-31.1 - VEECO INSTRUMENTS INCa2202112zex-31_1.htm
EX-32.2 - EX-32.2 - VEECO INSTRUMENTS INCa2202112zex-32_2.htm
EX-23.1 - EX-23.1 - VEECO INSTRUMENTS INCa2202112zex-23_1.htm

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Exhibit 21.1


Subsidiaries of the Registrant

Subsidiary
  Jurisdiction of Organization

U.S. Subsidiaries

   

Veeco APAC Inc.

  DE

Veeco Process Equipment Inc.

  DE

Veeco TK LLC

  DE

Foreign Subsidiaries

   

Nihon Veeco K.K.

  Japan

Veeco Asia Pte. Ltd.

  Singapore

Veeco Malaysia Sdn. Bhd.

  Malaysia

Veeco Instruments GmbH

  Germany

Veeco Instruments Limited

  England

Veeco Instruments S.A.S.

  France

Veeco Instruments B.V.

  Netherlands

Veeco Instruments (Shanghai) Co. Ltd.

  China

Veeco Korea Inc.

  Korea

Veeco Taiwan Inc.

  Taiwan



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Subsidiaries of the Registrant