Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - ATMI INC | c12779e10vk.htm |
| EX-21 - EXHIBIT 21 - ATMI INC | c12779exv21.htm |
| EX-32 - EXHIBIT 32 - ATMI INC | c12779exv32.htm |
| EX-31.2 - EXHIBIT 31.2 - ATMI INC | c12779exv31w2.htm |
| EX-31.1 - EXHIBIT 31.1 - ATMI INC | c12779exv31w1.htm |
| EX-10.46 - EXHIBIT 10.46 - ATMI INC | c12779exv10w46.htm |
| EX-10.44 - EXHIBIT 10.44 - ATMI INC | c12779exv10w44.htm |
| EX-10.41 - EXHIBIT 10.41 - ATMI INC | c12779exv10w41.htm |
| EX-10.45 - EXHIBIT 10.45 - ATMI INC | c12779exv10w45.htm |
| EX-10.42 - EXHIBIT 10.42 - ATMI INC | c12779exv10w42.htm |
Exhibit 23
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos.
33-49561, 333-55827, 333-56349, 333-46222, 333-107591, and 333-167318) and the Registration
Statements on Form S-3 (Nos. 333-82089, 333-94641, 333-31982, 333-46224, and 333-76378) of ATMI,
Inc. of our reports dated February 18, 2011, with respect to the consolidated financial statements
and schedule of ATMI, Inc., and the effectiveness of internal control over financial reporting of
ATMI, Inc., included in this Annual Report (Form 10-K) for the year ended December 31, 2010.
| /s/ ERNST & YOUNG LLP |
Stamford, Connecticut
February 18, 2011
February 18, 2011