Attached files

file filename
10-K - ANNUAL REPORT - AMTECH SYSTEMS INCamtech_10k.htm
EX-23.1 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - AMTECH SYSTEMS INCexhibit23-1.htm
EX-32.1 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INCexhibit32-1.htm
EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - AMTECH SYSTEMS INCexhibit21-1.htm
EX-32.2 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INCexhibit32-2.htm
EX-31.2 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INCexhibit31-2.htm
EX-31.1 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INCexhibit31-1.htm

Exhibit 24.1
 
POWER OF ATTORNEY
 
KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS JONG S. WHANG AND BRADLEY C. ANDERSON, AND EACH OF THEM, HIS TRUE AND LAWFUL ATTORNEYS-IN-FACT AND AGENTS, WITH FULL POWER OF SUBSTITUTION AND RESUBSTITUTION, FOR HIM AND IN HIS NAME, PLACE AND STEAD, IN ANY AND ALL CAPACITIES, TO SIGN AMTECH SYSTEMS, INC.’S ANNUAL REPORT ON FORM 10-K FOR THE FISCAL YEAR ENDED SEPTEMBER 30, 2010, AND ANY AND ALL AMENDMENTS TO SUCH ANNUAL REPORT ON FORM 10-K, AND TO FILE THE SAME, WITH ALL EXHIBITS THERETO, AND OTHER DOCUMENTS IN CONNECTION THEREWITH WITH THE SECURITIES AND EXCHANGE COMMISSION, GRANTING UNTO SAID ATTORNEYS-IN-FACT AND AGENTS, AND EACH OF THEM, FULL POWER AND AUTHORITY TO DO AND PERFORM EACH AND EVERY ACT AND THING REQUISITE AND NECESSARY TO BE DONE IN AND ABOUT THE PREMISES, AS FULLY AND TO ALL INTENTS AND PURPOSES AS HE MIGHT OR COULD DO IN PERSON HEREBY RATIFYING AND CONFIRMING ALL THAT SAID ATTORNEYS-IN-FACT AND AGENTS, OR HIS SUBSTITUTE OR SUBSTITUTES, MAY LAWFULLY DO OR CAUSE TO BE DONE BY VIRTUE HEREOF.
 
SIGNATURE                 TITLE                 DATE
         
/s/ Jong S. Whang   Chairman of the Board, President   November 12, 2010
Jong S. Whang   and Chief Executive Officer    
    (Principal Executive Officer)    
         
/s/ Bradley C. Anderson   Vice President – Finance and Chief   November 12, 2010
Bradley C. Anderson   Financial Officer    
    (Principal Financial Officer)    
         
/s/ Robert T. Hass   Chief Accounting Officer   November 12, 2010
Robert T. Hass   (Principal Accounting Officer)    
         
/s/ Michael Garnreiter   Director   November 12, 2010
Michael Garnreiter        
         
 
/s/ Alfred W. Giese   Director   November 12, 2010
Alfred W. Giese        
         
 
/s/ Egbert J.G. Goudena   Director   November 12, 2010
Egbert J.G. Goudena        
         
 
/s/ Robert F. King   Director   November 12, 2010
Robert F. King        
         
 
/s/ Dr. Jeong Mo Hwang   Director   November 12, 2010
Dr. Jeong Mo Hwang      
 
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