Attached files

file filename
10-K - MKS INSTRUMENTS, INC. - MKS INSTRUMENTS INCb78680e10vk.htm
EX-21.1 - EX-21.1 SUBSIDIARIES OF THE REGISTRANT - MKS INSTRUMENTS INCb78680exv21w1.htm
EX-31.1 - EX-31.1 SECTION 302 CERTIFICATION OF CEO - MKS INSTRUMENTS INCb78680exv31w1.htm
EX-31.2 - EX-31.2 SECTION 302 CERTIFICATION OF CFO - MKS INSTRUMENTS INCb78680exv31w2.htm
EX-23.1 - EX-23.1 CONSENT OF PRICEWATERHOUSECOOPERS LLP - MKS INSTRUMENTS INCb78680exv23w1.htm
         
EXHIBIT 32.1
CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER
PURSUANT TO 18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002
     In connection with the Annual Report on Form 10-K of MKS Instruments, Inc. (the “Company”) for the period ended December 31, 2009 as filed with the Securities and Exchange Commission on the date hereof (the “Report”), the undersigned, Leo Berlinghieri, Chief Executive Officer and President of the Company, and Seth H. Bagshaw, Vice President and Chief Financial Officer of the Company, each hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that, based on his knowledge:
  (1)   The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and
 
  (2)   The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.
         
Dated: February 26, 2010  /s/ Leo Berlinghieri    
  Leo Berlinghieri   
  Chief Executive Officer and President   
     
Dated: February 26, 2010  /s/ Seth H. Bagshaw    
  Seth H. Bagshaw   
  Vice President and Chief Financial Officer