Attached files
| file | filename |
|---|---|
| 10-K - MKS INSTRUMENTS, INC. - MKS INSTRUMENTS INC | b78680e10vk.htm |
| EX-32.1 - EX-32.1 SECTION 906 CERTIFICATION OF CEO & CFO - MKS INSTRUMENTS INC | b78680exv32w1.htm |
| EX-31.1 - EX-31.1 SECTION 302 CERTIFICATION OF CEO - MKS INSTRUMENTS INC | b78680exv31w1.htm |
| EX-31.2 - EX-31.2 SECTION 302 CERTIFICATION OF CFO - MKS INSTRUMENTS INC | b78680exv31w2.htm |
| EX-23.1 - EX-23.1 CONSENT OF PRICEWATERHOUSECOOPERS LLP - MKS INSTRUMENTS INC | b78680exv23w1.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |
ASTeX GmbH
|
Germany | |
Ion Systems, Inc.
|
California | |
MKS (Bermuda) Ltd.
|
Bermuda | |
MKS Denmark APS
|
Denmark | |
MKS Germany Holding GmbH
|
Germany | |
MKS Instruments (Asia) Ltd.
|
Bermuda | |
MKS Instruments (China) Company Ltd.
|
China | |
MKS Instruments Deutschland GmbH
|
Germany | |
MKS Instruments France S.A.S.
|
France | |
MKS Instruments (Hong Kong) Ltd.
|
Hong Kong | |
MKS Instruments (Shanghai) Ltd.
|
Shanghai | |
MKS Instruments U.K. Limited
|
United Kingdom | |
MKS Japan, Inc.
|
Japan | |
MKS Korea Co., Ltd.
|
Korea | |
MKS Luxembourg S.A.R.L.
|
Luxembourg | |
MKS MSC, Inc.
|
Massachusetts | |
MKS Taiwan Technology Ltd.
|
Taiwan | |
MKS Technology Limited
|
United Kingdom | |
MKS Tega Ltd.
|
Israel | |
MKS Tenta Products Ltd.
|
Israel | |
MKS Umetrics AB
|
Sweden | |
Spectra Sensortech, Ltd.
|
United Kingdom | |
Telvac Engineering Limited
|
United Kingdom | |
Tianjin Yield Co, Ltd.
|
China | |
Umetrics, Inc.
|
New Jersey | |
Umetrics (UK) Ltd.
|
UK | |
Yield Dynamics, Inc.
|
California |