Attached files

file filename
EX-31.2 - 302 CFO CERTIFICATION - CYMER INCdex312.htm
EX-32.2 - 906 CFO CERTIFICATION - CYMER INCdex322.htm
EX-32.1 - 906 CEO CERTIFICATION - CYMER INCdex321.htm
EX-31.1 - 302 CEO CERTIFICATION - CYMER INCdex311.htm
EX-10.28 - MEMORANDUM OF UNDERSTANDING - CYMER INCdex1028.htm
EX-10.17 - SEPARATION AGREEMENT - CYMER INCdex1017.htm
EX-10.16 - EMPLOYMENT AGREEMENT - PAUL B. BOWMAN - CYMER INCdex1016.htm
10-K - FORM 10-K - CYMER INCd10k.htm

Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

The Board of Directors

Cymer, Inc.:

We consent to the incorporation by reference in the registration statements (No. 333-16559, No. 333-99975, No. 333-88616, No. 333-67491, No. 333-48242, No. 333-69736, , No. 333-109544, No. 333-118496, No. 333-127748, No. 333-142621, No. 333-145089, and 333-160995) on Form S-8 of Cymer, Inc. of our reports dated February 26, 2010, with respect to the consolidated balance sheets of Cymer, Inc. and subsidiaries as of December 31, 2009 and 2008, and the related consolidated statements of operations, comprehensive income, equity, and cash flows, for each of the years in the three-year period ended December 31, 2009, and the related consolidated financial statement schedule, and the effectiveness of internal control over financial reporting as of December 31, 2009, which reports appear in the December 31, 2009 annual report on Form 10-K of Cymer, Inc.

/s/ KPMG LLP

San Diego, California

February 26, 2010