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10-K - FORM 10-K - VEECO INSTRUMENTS INCa2196619z10-k.htm
EX-31.1 - EXHIBIT 31.1 - VEECO INSTRUMENTS INCa2196619zex-31_1.htm
EX-32.2 - EXHIBIT 32.2 - VEECO INSTRUMENTS INCa2196619zex-32_2.htm
EX-32.1 - EXHIBIT 32.1 - VEECO INSTRUMENTS INCa2196619zex-32_1.htm
EX-31.2 - EXHIBIT 31.2 - VEECO INSTRUMENTS INCa2196619zex-31_2.htm
EX-23.1 - EXHIBIT 23.1 - VEECO INSTRUMENTS INCa2196619zex-23_1.htm

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Exhibit 21.1

Veeco Instruments Inc.
Annual Report on Form 10-K for the Year Ended December 31, 2009
Exhibit 21.1—Subsidiaries of the Registrant

Subsidiary
  Jurisdiction of
Organization

U.S. Subsidiaries

   

Veeco APAC Inc. 

  DE

Veeco Compound Semiconductor Inc. 

  MN

Veeco Metrology Inc. 

  AZ
 

Veeco Corporate LLC

  DE

Veeco Process Equipment Inc. 

  DE

Foreign Subsidiaries

   

Nihon Veeco K.K. 

  Japan

Veeco Asia Pte. Ltd. 

  Singapore
 

Veeco Malaysia Sdn. Bhd. 

  Malaysia

Veeco Instruments GmbH

  Germany

Veeco Instruments Limited

  England

Veeco Instruments S.A.S. 

  France
 

Veeco Instruments B.V. 

  Netherlands

Veeco Instruments (Shanghai) Co. Ltd. 

  China

Veeco Korea Inc. 

  Korea

Veeco Taiwan Inc. 

  Taiwan



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