Attached files

file filename
EX-32.2 - CERTIFICATION OF CHIEF FINANCIAL OFFICER, SECTION 906 - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCdex322.htm
EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCdex211.htm
EX-31.2 - CERTIFICATION OF CHIEF FINANCIAL OFFICER, SECTION 302 - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCdex312.htm
EX-32.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER, SECTION 906 - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCdex321.htm
EX-31.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER, SECTION 302 - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCdex311.htm
10-K - FORM 10-K - VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INCd10k.htm

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We hereby consent to the incorporation by reference in the Registration Statement on Form S-8 (No. 333-75529, 333-87738, 333-103032, 333-113430, 333-123329, 333-132060 and 333-133167) of Varian Semiconductor Equipment Associates, Inc. of our report dated November 24, 2009 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.

/s/ PRICEWATERHOUSECOOPERS LLP

Boston, Massachusetts

November 24, 2009