Attached files
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statement on Form S-8 (No. 333-75529, 333-87738, 333-103032, 333-113430, 333-123329, 333-132060 and 333-133167) of Varian Semiconductor Equipment Associates, Inc. of our report dated November 24, 2009 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.
/s/ PRICEWATERHOUSECOOPERS LLP
Boston, Massachusetts
November 24, 2009