Attached files
file | filename |
---|---|
EX-32.2 - EX-32.2 - AXCELIS TECHNOLOGIES INC | acls-20201231xex32d2.htm |
EX-32.1 - EX-32.1 - AXCELIS TECHNOLOGIES INC | acls-20201231xex32d1.htm |
EX-31.2 - EX-31.2 - AXCELIS TECHNOLOGIES INC | acls-20201231xex31d2.htm |
EX-31.1 - EX-31.1 - AXCELIS TECHNOLOGIES INC | acls-20201231xex31d1.htm |
EX-23.1 - EX-23.1 - AXCELIS TECHNOLOGIES INC | acls-20201231xex23d1.htm |
EX-10.12 - EX-10.12 - AXCELIS TECHNOLOGIES INC | acls-20201231xex10d12.htm |
EX-10.11 - EX-10.11 - AXCELIS TECHNOLOGIES INC | acls-20201231xex10d11.htm |
10-K - 10-K - AXCELIS TECHNOLOGIES INC | acls-20201231x10k.htm |
Exhibit 21.1
Axcelis Technologies, Inc.
Exhibit 21.1 to Form 10-K for the year ended December 31, 2020
Subsidiaries
The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:
Domestic Subsidiaries
1. | Axcelis Technologies (Israel) Inc., a Delaware corporation |
European Subsidiaries
2. | Axcelis Technologies GmbH (Germany) |
3. | Axcelis Technologies, Srl (Italy) |
4. | Axcelis Technologies, Sarl (France) |
Asian Subsidiaries
5. | Axcelis Technologies, KK (Japan) |
6. | Axcelis Technologies Limited (Korea) |
7. | Axcelis Technologies, Ltd. (Taiwan) |
8. | Axcelis Technologies Pte. Ltd. (Singapore) |
9. | Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China) |
1