Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - MKS INSTRUMENTS INC | d455647d10k.htm |
| EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d455647dex321.htm |
| EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d455647dex312.htm |
| EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d455647dex311.htm |
| EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d455647dex231.htm |
| EX-10.8 - EX-10.8 - MKS INSTRUMENTS INC | d455647dex108.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |
| Beijing Newport Spectra-Physics Technologies Co., Ltd. | China | |
| High Q Laser GmbH | Austria | |
| Micro-Controle Spectra-Physics S.A.S. | France | |
| MKS Denmark ApS | Denmark | |
| MKS German Holding GmbH | Germany | |
| MKS Instruments (China) Company Limited | China | |
| MKS Instruments (Hong Kong) Limited | Hong Kong | |
| MKS Instruments (Shanghai) Limited | China | |
| MKS Instruments (Singapore) Pte. Ltd. | Singapore | |
| MKS Instruments Deutschland GmbH | Germany | |
| MKS Instruments Holdings Ltd | United Kingdom | |
| MKS Instruments Israel Ltd. | Israel | |
| MKS Instruments Italy S.r.l. | Italy | |
| MKS Instruments UK Limited | United Kingdom | |
| MKS International Holdings Limited | United Kingdom | |
| MKS Japan, Inc. | Japan | |
| MKS Korea Ltd. | Korea | |
| MKS Luxembourg S.a.r.l. | Luxembourg | |
| MKS Taiwan Technology Limited | Taiwan | |
| Newport Corporation | Nevada | |
| Newport Instruments Canada Corporation | California | |
| Newport Laser Holding GmbH | Austria | |
| Newport Ophir Holdings Ltd. | Israel | |
| Newport Opto-Electronics Technologies (Korea), LLC | Korea | |
| Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore | |
| Newport Opto-Electronics Technologies (Wuxi) Company Limited | China | |
| Newport Spectra-Physics BV | Netherlands | |
| Newport Spectra-Physics GmbH | Germany | |
| Newport Spectra-Physics Limited | United Kingdom | |
| Ophir Japan Ltd. | Japan | |
| Ophir Optics SRL | Romania | |
| Ophir Optronics GmbH | Germany | |
| Ophir Optronics Ltd. | Israel | |
| Ophir Optronics Solutions Ltd. | Israel | |
| Ophir Spiricon Europe GmbH | Germany | |
| Ophir-Spiricon, LLC | Utah | |
| Spectra-Physics, K.K. | Japan | |
| V-Gen Ltd. | Israel |