Attached files
| file | filename |
|---|---|
| EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d60398dex312.htm |
| EX-18.1 - EX-18.1 - MKS INSTRUMENTS INC | d60398dex181.htm |
| EX-10.10 - EX-10.10 - MKS INSTRUMENTS INC | d60398dex1010.htm |
| EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d60398dex231.htm |
| 10-K - FORM 10-K - MKS INSTRUMENTS INC | d60398d10k.htm |
| EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d60398dex311.htm |
| EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d60398dex321.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
| MKS Instruments Italy S.r.l. |
Italy | |||
| MKS Denmark ApS |
Denmark | |||
| MKS German Holding GmbH |
Germany | |||
| MKS Instruments (Asia) Ltd. |
Bermuda | |||
| MKS Instruments (China) Company Limited |
China | |||
| MKS Instruments Deutschland GmbH |
Germany | |||
| MKS Instruments Holdings Ltd |
United Kingdom | |||
| MKS Instruments (Hong Kong) Limited |
Hong Kong | |||
| MKS Instruments (Shanghai) Limited |
China | |||
| MKS Instruments (Singapore) Pte. Ltd. |
Singapore | |||
| MKS Instruments UK Limited |
United Kingdom | |||
| MKS Japan, Inc. |
Japan | |||
| MKS Korea Ltd. |
Korea | |||
| MKS Luxembourg S.a.r.l. |
Luxembourg | |||
| MKS International Holdings Limited |
United Kingdom | |||
| MKS Taiwan Technology Limited |
Taiwan | |||
| MKS Instruments Israel Ltd. |
Israel | |||
| MKS Instruments AB |
Sweden |