Attached files
| file | filename |
|---|---|
| EX-10.12 - EX-10.12 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_12.htm |
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2223440z10-k.htm |
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2223440zf1_10-04.pdf |
| EX-2.2 - EX-2.2 - AXCELIS TECHNOLOGIES INC | a2223440zex-2_2.htm |
| EX-10.1 - EX-10.1 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_1.htm |
| EX-10.2 - EX-10.2 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_2.htm |
| EX-10.13 - EX-10.13 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_13.htm |
| EX-10.15 - EX-10.15 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_15.htm |
| EX-10.23 - EX-10.23 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_23.htm |
| EX-10.24 - EX-10.24 - AXCELIS TECHNOLOGIES INC | a2223440zex-10_24.htm |
| EX-21.1 - EX-21.1 - AXCELIS TECHNOLOGIES INC | a2223440zex-21_1.htm |
| EX-31.1 - EX-31.1 - AXCELIS TECHNOLOGIES INC | a2223440zex-31_1.htm |
| EX-31.2 - EX-31.2 - AXCELIS TECHNOLOGIES INC | a2223440zex-31_2.htm |
| EX-32.1 - EX-32.1 - AXCELIS TECHNOLOGIES INC | a2223440zex-32_1.htm |
| EX-32.2 - EX-32.2 - AXCELIS TECHNOLOGIES INC | a2223440zex-32_2.htm |
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CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in the following Registration Statements:
- (1)
- Registration
Statements (Form S-8 Nos. 333-181750, 333-188967 and 333-196157) pertaining to the 2012 Equity Incentive Plan of Axcelis
Technologies, Inc.,
- (2)
- Registration
Statement (Form S-8 No. 333-49726) pertaining to the Employee Stock Purchase Plan of Axcelis Technologies, Inc.,
- (3)
- Registration
Statements (Form S-8 No. 333-49768) pertaining to the 2000 Stock Plan of Axcelis Technologies, Inc.,
- (4)
- Registration
Statement (Form S-8 No. 333-120356) pertaining to the 2000 Stock Plan and 2012 Equity Incentive Plan and,
- (5)
- Registration Statement (Form S-3 No. 333-192533) pertaining to the registration of securities;
of our reports dated March 11, 2015 with respect to the consolidated financial statements and schedule of Axcelis Technologies, Inc., and the effectiveness of internal control over financial reporting of Axcelis Technologies', Inc., included in this Annual Report (Form 10-K) of Axcelis Technologies, Inc. for the year ended December 31, 2014.
/s/ Ernst & Young LLP
Boston,
Massachusetts
March 11, 2015
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM