Attached files
| file | filename |
|---|---|
| EXCEL - IDEA: XBRL DOCUMENT - MKS INSTRUMENTS INC | Financial_Report.xls |
| EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d838776dex311.htm |
| EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d838776dex231.htm |
| EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d838776dex312.htm |
| EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d838776dex321.htm |
| EX-10.11 - EX-10.11 - MKS INSTRUMENTS INC | d838776dex1011.htm |
| EX-10.27 - EX-10.27 - MKS INSTRUMENTS INC | d838776dex1027.htm |
| 10-K - 10-K - MKS INSTRUMENTS INC | d838776d10k.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
| Alter S.r.l. | Italy | |||
| ASTeX GmbH | Germany | |||
| MKS Denmark ApS | Denmark | |||
| MKS German Holding GmbH | Germany | |||
| MKS Instruments (Asia) Ltd. | Bermuda | |||
| MKS Instruments (China) Company Limited | China | |||
| MKS Instruments Deutschland GmbH | Germany | |||
| MKS Instruments Holdings Ltd. | United Kingdom | |||
| MKS Instruments (Hong Kong) Limited | Hong Kong | |||
| MKS Instruments (Shanghai) Limited | China | |||
| MKS Instruments (Singapore) Pte. Ltd. | Singapore | |||
| MKS Instruments UK.Limited | United Kingdom | |||
| MKS Japan, Inc. | Japan | |||
| MKS Korea Ltd. | Korea | |||
| MKS Luxembourg S.a.r.l. | Luxembourg | |||
| MKS Spectra Holdings Limited | United Kingdom | |||
| MKS Taiwan Technology Limited | Taiwan | |||
| MKS Technology Limited | United Kingdom | |||
| MKS Tega Ltd. | Israel | |||
| MKS Tenta Products Ltd. | Israel | |||
| MKS Umetrics AB | Sweden | |||
| Orion Metrology, Inc. | California | |||
| Plasmart, Inc. | Korea | |||
| Telvac Engineering Limited | United Kingdom | |||
| Umetrics, Inc. | New Jersey | |||
| Umetrics UK Limited | United Kingdom |