Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - INTEVAC INCFinancial_Report.xls
EX-21.1 - EX-21.1 - INTEVAC INCd835534dex211.htm
EX-31.1 - EX-31.1 - INTEVAC INCd835534dex311.htm
EX-32.1 - EX-32.1 - INTEVAC INCd835534dex321.htm
EX-31.2 - EX-31.2 - INTEVAC INCd835534dex312.htm
10-K - FORM 10-K - INTEVAC INCd835534d10k.htm

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We have issued our reports dated February 17, 2015, with respect to the consolidated financial statements and internal control over financial reporting included in the Annual Report of Intevac, Inc. and subsidiaries on Form 10-K for the year ended January 3, 2015. We hereby consent to the incorporation by reference of said reports in the Registration Statements of Intevac, Inc. and subsidiaries on Forms S-8 (File No. 333-197700, effective July 29, 2014; File No. 333-190250, effective July 30, 2013; File No. 333-181929, effective June 6, 2012; File No. 333-175979, effective August 2, 2011; File No. 333-168505, effective August 3, 2010; File No. 333-160596, effective July 15, 2009; File No. 333-152773, effective August 5, 2008; File No. 333-143418, effective May 31, 2007; File No. 333-134422, effective May 24, 2006; File No. 333-125523, effective June 6, 2005; File No. 333-109260, effective September 29, 2003; File No. 333-106960, effective July 11, 2003; File No. 333-50166, effective November 17, 2000; and File No. 333-65421, effective October 7, 1998).

/s/ GRANT THORNTON LLP

San Jose, California

February 17, 2015