Attached files

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10-Q - FORM 10-Q - FSI INTERNATIONAL INCd368379d10q.htm
EX-31.2 - CERTIFICATION BY PRINCIPAL FINANCIAL AND ACCOUNTING OFFICER - FSI INTERNATIONAL INCd368379dex312.htm
EX-10.1 - INCENTIVE COMPENSATION PLAN - FSI INTERNATIONAL INCd368379dex101.htm
EX-31.1 - CERTIFICATION BY PRINCIPAL EXECUTIVE OFFICER - FSI INTERNATIONAL INCd368379dex311.htm
EXCEL - IDEA: XBRL DOCUMENT - FSI INTERNATIONAL INCFinancial_Report.xls

EXHIBIT 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 (18 U.S.C. SECTION 1350)

In connection with the Quarterly Report of FSI International, Inc., a Minnesota corporation (the “Company”), on Form 10-Q for the quarter ended May 26, 2012 as filed with the Securities and Exchange Commission (the “Report”), each of the undersigned hereby certifies, pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to the undersigned’s knowledge:

(1) The Report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2) The information contained in the Report fairly presents, in all material respects, the financial condition and result of operations of the Company.

 

Date: June 28, 2012    
     

/s/ Donald S. Mitchell

      Donald S. Mitchell
      Chairman, President and
      Chief Executive Officer
      /s/ Patricia M. Hollister
      Patricia M. Hollister
      Chief Financial Officer and
      Assistant Secretary