Attached files
file | filename |
---|---|
10-K - ZYGO CORP | c66867_10-k.htm |
EX-31.1 - ZYGO CORP | c66867_ex31-1.htm |
EX-32.1 - ZYGO CORP | c66867_ex32-1.htm |
EX-32.2 - ZYGO CORP | c66867_ex32-2.htm |
EX-23.1 - ZYGO CORP | c66867_ex23-1.htm |
EX-31.2 - ZYGO CORP | c66867_ex31-2.htm |
EXHIBIT 21
SUBSIDIARIES OF ZYGO CORPORATION (DELAWARE)
|
Zygo KK (Japan) |
100% owned by Registrant (effective as of October 1, 1999) |
|
Zygo PTE LTD (Singapore) |
100% owned by Registrant (effective as of January 1, 1998) |
|
ZygoLamda Metrology Instrument (Shanghai) Co., Ltd. (China) |
66% owned by Zygo PTE LTD (effective as of April 3, 2008) |
|
Zygo Germany, GmbH (Germany) |
100% owned by Registrant (effective as of December 1, 2006) |
|
ZygoLOT GmbH (Germany) |
60% owned by Zygo Germany, GmbH (effective as of December 28, 2006) |
|
Six Brookside Drive (Connecticut) |
100% owned by Registrant (effective as of January 9, 1998) |
|
Zygo Canada Inc. (Canada) |
100% owned by Registrant (effective as of February 22, 2008) |
|
Zygo Singapore Inspection Systems PTE. LTD. (Singapore) |
100% owned by Zygo Canada Inc. (effective as of February 28, 2008) |
|
Zemetrics (Arizona) |
100% owned by Registrant (effective as of January 22, 2010) |
|
Zygo Richmond, Inc. (California) |
100% owned by Registrant (effective as of November 12, 2010) |