Attached files

file filename
S-1/A - AMENDMENT NO. 8 TO FORM S-1 - NEXX SYSTEMS INCds1a.htm
EX-5.1 - OPINION OF GENNARI ARONSON LLP - NEXX SYSTEMS INCdex51.htm
EX-4.1 - SPECIMEN STOCK CERTIFICATE - NEXX SYSTEMS INCdex41.htm
EX-1.1 - UNDERWRITING AGREEMENT - NEXX SYSTEMS INCdex11.htm
EX-23.2 - CONSENT OF MCGLADREY & PULLEN, LLP - NEXX SYSTEMS INCdex232.htm
EX-10.1.5.1 - FORM OF AMENDMENT TO RESTRICTED STOCK UNIT AGREEMENT - NEXX SYSTEMS INCdex10151.htm
EX-10.25.7.1 - AMENDMENT NO. 1 TO WARRANT - NEXX SYSTEMS INCdex102571.htm

EXHIBIT 23.3

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the use in amendment No. 8 to the registration statement on Form S-1 of our report dated April 28, 2009, except for changes related to the adoption of ASR No. 268 and ASC 480, as to which the date is February 11, 2010, for changes related to the cash flow statement, as to which the date is May 14, 2010, and except for the second and third paragraphs of Note 10, as to which the date is June 15, 2011, relating to our audit of the financial statements of NEXX Systems, Inc. for the year ended December 31, 2008 appearing in the prospectus, which is part of the registration statement.

We also consent to the reference to us under the heading “Experts” in the prospectus.

/s/ PARENT, MCLAUGHLIN & NANGLE

 

PARENT, MCLAUGHLIN & NANGLE, CERTIFIED PUBLIC ACCOUNTANTS, INC.

Boston, Massachusetts

July 21, 2011