Attached files

file filename
10-K/A - RUDOLPH TECHNOLOGIES INCrtec10ka12312010.htm
EX-21.1 - RUDOLPH TECHNOLOGIES INCexhibit21110ka.htm
EX-23.1 - RUDOLPH TECHNOLOGIES INCexhibit231201010ka.htm
EX-31.1 - RUDOLPH TECHNOLOGIES INCrtec12312010ex31110ka.htm
EX-31.2 - RUDOLPH TECHNOLOGIES INCrtec12312010ex31210ka.htm
EX-32.1 - RUDOLPH TECHNOLOGIES INCrtec12312010ex32110ka.htm


Exhibit 32.2
 
CERTIFICATION OF CHIEF FINANCIAL OFFICER
PURSUANT TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

 
I, Steven R. Roth, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that the Annual Report of Rudolph Technologies, Inc. on Form 10-K/A for the year ended December 31, 2010 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934 and that information contained in such Annual Report on Form 10-K/A fairly presents in all material respects the financial condition and results of operations of Rudolph Technologies, Inc.
 

Date: June 24, 2011

 
 
By: 
/s/  STEVEN R. ROTH
 
 
Steven R. Roth
Senior Vice President and Chief Financial Officer