Attached files

file filename
EX-3.4 - FORM OF AMENDED AND RESTATED BY-LAWS OF THE REGISTRANT - NEXX SYSTEMS INCdex34.htm
EX-3.3 - BY-LAWS OF REGISTRANT - NEXX SYSTEMS INCdex33.htm
EX-10.2 - 2011 EQUITY INCENTIVE PLAN - NEXX SYSTEMS INCdex102.htm
EX-3.1.3 - CERTIFICATE OF AMENDMENT OF CERTIFICATE OF INCORPORATION - NEXX SYSTEMS INCdex313.htm
EX-10.2.3 - FORM OF PERFORMANCE SHARES AWARD - NEXX SYSTEMS INCdex1023.htm
EX-10.2.6 - FORM OF STOCK BONUS AWARD AGREEMENT - NEXX SYSTEMS INCdex1026.htm
EX-10.28 - DIRECTOR COMPENSATION SCHEDULE - NEXX SYSTEMS INCdex1028.htm
EX-10.2.2 - FORM OF RESTRICTED STOCK UNIT AWARD - NEXX SYSTEMS INCdex1022.htm
EX-10.2.4 - FORM OF RESTRICTED STOCK AWARD AGREEMENT - NEXX SYSTEMS INCdex1024.htm
EX-10.2.1 - FORM OF STOCK OPTION AWARD AGREEMENT - NEXX SYSTEMS INCdex1021.htm
EX-10.27 - KEY EMPLOYEE AGREEMENT BETWEEN REGISTRANT AND ROBERT JACKSON - NEXX SYSTEMS INCdex1027.htm
EX-10.26 - KEY EMPLOYEE AGREEMENT BETWEEN THE REGISTRANT AND REZWAN LATEEF - NEXX SYSTEMS INCdex10261.htm
EX-10.25.6 - SECOND MODIFICATION TO CREDIT AGREEMENT - NEXX SYSTEMS INCdex10256.htm
EX-10.25.8 - EXPORT-IMPORT BANK OF THE UNITED STATES BORROWER AGREEMENT - NEXX SYSTEMS INCdex10258.htm
EX-10.25.7 - WARRANT AGREEMENT - NEXX SYSTEMS INCdex10257.htm
EX-3.2 - FORM OF AMENDED AND RESTATED CERTIFICATE OF INCORPORATION - NEXX SYSTEMS INCdex32.htm
S-1/A - AMENDMENT NO.7 TO FORM S-1 - NEXX SYSTEMS INCds1a.htm
EX-23.2 - CONSENT OF MCGLADREY & PULLEN, LLP - NEXX SYSTEMS INCdex232.htm
EX-10.2.5 - FORM OF STOCK APPRECIATION RIGHTS AWARD AGREEMENT - NEXX SYSTEMS INCdex1025.htm

EXHIBIT 23.3

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the use in amendment No. 7 to the registration statement on Form S-1 of our report dated April 28, 2009, except for changes related to the adoption of ASR No. 268 and ASC 480, as to which the date is February 11, 2010, for changes related to the cash flow statement, as to which the date is May 14, 2010, and except for the second and third paragraphs of Note 10, as to which the date is June 15, 2011, relating to our audit of the financial statements of NEXX Systems, Inc. for the year ended December 31, 2008 appearing in the prospectus, which is part of the registration statement.

We also consent to the reference to us under the heading “Experts” in the prospectus.

/s/ PARENT, MCLAUGHLIN & NANGLE

 

PARENT, MCLAUGHLIN & NANGLE, CERTIFIED PUBLIC ACCOUNTANTS, INC.

Boston, Massachusetts

June 22, 2011