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10-Q - FORM 10-Q - FSI INTERNATIONAL INCc63867e10vq.htm
EX-10.1 - EX-10.1 - FSI INTERNATIONAL INCc63867exv10w1.htm
EX-31.1 - EX-31.1 - FSI INTERNATIONAL INCc63867exv31w1.htm
EX-31.2 - EX-31.2 - FSI INTERNATIONAL INCc63867exv31w2.htm
EXHIBIT 32.1
CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 (18 U.S.C. SECTION 1350)
     In connection with the Quarterly Report of FSI International, Inc., a Minnesota corporation (the “Company”), on Form 10-Q for the quarter ended February 26, 2011 as filed with the Securities and Exchange Commission (the “Report”), each of the undersigned hereby certifies, pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to the undersigned’s knowledge:
     (1) The Report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934; and
     (2) The information contained in the Report fairly presents, in all material respects, the financial condition and result of operations of the Company.
Date: April 5, 2011
         
 
  /s/ Donald S. Mitchell
 
   
 
  Donald S. Mitchell    
 
  Chairman, President and    
 
  Chief Executive Officer    
 
       
 
  /s/ Patricia M. Hollister
 
   
 
  Patricia M. Hollister    
 
  Chief Financial Officer and    
 
  Assistant Secretary